Mask Aligner

ELS106SA-B/ELS106SA

觀看設備規格:

  • ELS106SA-B
  • ELS106SA
Work Size: ψ50mm ~ 150mm wafer or 
Max. 150mm x 150 mm substrate
Mask Size: 4" ~ 7" Quartz or Soda Lime
Lamp House Watt 250W
Wavelength Range Broad Band
( i line : 365nm / 
 h line : 400nm / g line : 436 nm )
Light Intensity > 16 mW / cm2  based on 365 nm (250W)
> 40 mW /
 cm2  based on 365 nm (500W)
Lamp Source High Mercury Lamp 
Light Intensity Uniformity < 3% based on Dia. 4wafer
Effective Exposure Area Max. 150 mm x 150 mm
Compensation Leveling System Driven By Auto
Contact Driven By Auto
Exposure Mode Proximity / Soft Contact / Hard Contact /
Vacuum Contact
Alignment System By CCD driven by manual method
Alignment Accuracy ±1μm for top side alignment
±3μm for bottom side alignment 
L/S Resolution 1μm based on contact mode and PR thickness  1μ
Anti-vibration Table Yes
System Control: PC Base
Option Cut Filter
500W Lamp House

DUV Lamp House
積算光量功能
Power Meter
ELS Model No.  ELS106SA-B

Work Size: ψ50mm ~ 150mm wafer or 
Max. 150mm x 150 mm substrate
Mask Size: 4" ~ 7" Quartz or Soda Lime
Lamp House Watt 250W
Wavelength Range Broad Band
( i line : 365nm / 
 h line : 400nm / g line : 436 nm )
Light Intensity > 16 mW / cmbased on 365 nm (250W)
> 40 mW / cmbased on 365 nm (500W)
Lamp Source High Mercury Lamp 
Light Intensity Uniformity < 3% based on Dia. 4" wafer 
Effective Exposure Area Max. 150 mm x 150 mm
Compensation Leveling System Driven By Auto
Contact Driven By Auto
Exposure Mode Proximity / Soft Contact / Hard Contact /
Vacuum Contact
Alignment System By CCD driven by manual method
Alignment Accuracy ±1μm
L/S Resolution 1μm based on contact mode and PR thickness 1μm
Anti-vibration Table Yes
System Control PC Base
Option Cut Filter
500W Lamp House

DUV Lamp House
Chuck for Broken wafer
積算光量功能
Power Meter
ELS Model No.  ELS106SA

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