Spin Stripper
ELS906FA
觀看設備規格：
- ELS906FA
| Wafer Size： | 100mm ~ 150mm wafer |
| Layout Unit： |
LD / Robot / Centering / Soaking system / Stripping system / Cleaning / ULD |
| Robot Type： | Double arms with mapping system |
| Clean Class： | Class 100 with HEPA |
| Spin Speed： | 30 ~ 5000 rpm |
| Soaking System： | Stripper Chemical Temp. 80℃ |
| Stripping System： |
With patented TCM Nozzle® Scan Speed Flexible |
| System Control： |
PC Base (Option : CIM & SECS / GEM function) |
| PLC Sequencer： | Mitsubishi Q series |
| Recipe： | 30 recipe x 50 step |
| Throughput / hr： | 35 pcs based on recipe |
| Performance： |
1. Dry in Dry out 2. One Station for Metal Lift-off & PR Remove 3. Metal (Au) Recovery Rate > 90% 4. Stripper Chemical cost down > 50% (compare with Wet Bench Type) |
