Spin Stripper
ELS2100SA Series
觀看設備規格：
- ELS2100SA Series
| Wafer Size： | 50mm ~ 300mm wafer |
| HPC Chamber： | 1 |
| Spin Speed： | 30 ~ 4000 rpm |
| High Pressure Nozzle： |
Stream / Spray / MCM® Type Pressure Control By Recipe |
| Chemical： |
Temperature Control System Recycle / Fresh (Programmable) |
| Top / Back Side Rinse： | Yes |
| Variable Arm Speed： | Yes |
| Cleaner Chamber： | 1 ~ 2 |
| Nozzle： | Stream type |
| Chemical： | IPA / DIW / ACE (option) |
| Top / Back Side Rinse： | Yes |
| System Control： | PC |
| Option： |
Automatic Fire Extinguishing System CO2 Bubble System |
