Spin Stripper

ELS908FA

觀看設備規格:

  • ELS908FA
Wafer Size 150mm ~ 200mm wafer
Layout Unit: LD / Robot / Centering / Soaking system /
Stripping system / Cleaning / ULD
Robot Type Double arms with mapping system
Clean Class Class 100 with HEPA
Spin Speed 30 ~ 5000 rpm
Soaking System Stripper Chemical Temp. 80
Stripping System With patented TCM Nozzle®
Scan Speed Flexible
System Control PC Base
(Option : CIM & SECS / GEM function)
PLC Sequencer Mitsubishi Q series
Recipe 30 recipe x 50 step
Throughput / hr 35 pcs based on recipe
Performance 1. Dry in Dry out
2. One Station for Metal Lift-off & PR Remove

3. Metal (Au) Recovery Rate > 90%
4. Stripper Chemical cost down > 50%
(compare with Wet Bench Type)

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