Mask AOI



  • ELS807FA
Work Size: 5" & 7"
Layout Unit LD / Robot / Centering / Stage / ULD
Robot Type Single arm with mapping system
CCD Type Line scan CCD
Clean Class Class 100 with HEPA
Resolution 2μm / pixel
 Tact Time 5" mask100 sec/pc, scan 2" & 4" area
7" mask120 sec/pc, scan 6" area
(Base on working size & resolution)
Function Auto load recipe by barcode
Inspection defect
Mapping function
(1) Measure function
(2) Mask history system (Link mask cleaner)
System Control  PC Base
ELS Model No.  ELS807FA for max. 7" mask