Mask AOI
ELS807FA
觀看設備規格：
- ELS807FA
| Work Size： | □5" & □7" |
| Layout Unit： | LD / Robot / Centering / Stage / ULD |
| Robot Type： | Single arm with mapping system |
| CCD Type： | Line scan CCD |
| Clean Class： | Class 100 with HEPA |
| Resolution： | 2μm / pixel |
| Tact Time： |
5" mask：100 sec/pc, scan 2" & 4" area 7" mask：120 sec/pc, scan 6" area (Base on working size & resolution) |
| Function： |
Auto load recipe by barcode Inspection defect Mapping function Option： (1) Measure function (2) Mask history system (Link mask cleaner) |
| System Control ： | PC Base |
| ELS Model No. ： | ELS807FA for max. □7" mask |
