Spin Scrubber
ELS506FA
觀看設備規格：
- ELS506FA
| Wafer Size： | 100mm ~ 150mm wafer |
| Layout Unit： | LD / Robot / Centering / Clean Chamber / ULD |
| Robot Type： | Double arms with mapping system |
| Clean Class： | Class 100 with HEPA |
| Spin Speed： | 30 ~ 5000 rpm |
| Clean Chamber： | Spray Nozzle, Brush and N2 blow |
| System Control： |
PC Base (Option : CIM function) |
| PLC Sequencer： | Mitsubishi Q series |
| Recipe： | 30 recipe x 50 step |
| Throughput / hr： | 90 pcs based on recipe |
| Performance： |
1. Dry in Dry out 2. Particle Remove Rate > 98% (Production yield rate increase > 1%) |
