Mask Cleaner
ELS450FA
觀看設備規格：
- ELS450FA
| Work Size： | 1400 x 850mm & 800x900 mm Quartz Mask |
| Unit Component： |
LD / Robot / Centering / Spin cleaning cup / Reverse unit / EUV unit / ULD |
| Centering Accuracy： | ± 0.5mm |
| Robot Type： | Single Arm Yaskawa Robot |
| Spin Speed： | 30 ~ 1000rpm |
| Spin Speed Accuracy： | ± 5% |
| Acceleration： | 0 → 1000 rpm / 30 Sec. |
| Chemical Dispense System： | Alkaline Chemical |
| Brush Unit： | YES |
| MS Unit： | YES |
| DIW Rinse： | YES |
| N2 Dry Nozzle： | YES |
| Chemical Temp. Control System : | YES |
| Reverse Unit： | 270° |
| Inspection Light： | Spot light / Green Lamp / Back Light |
| EUV Lamp： | 172nm |
| EUV light Intensity： | > 50mW / cm2 |
| Recipe： | 30 Recipes x 50 Steps |
