Spin Mask Cleaner

ELS450FA

觀看設備規格:

  • ELS450FA
Work Size: 1400 x 850mm & 800x900 mm Quartz Mask
Unit Component LD / Robot / Centering / Spin cleaning cup /
Reverse unit / EUV unit / ULD
Centering Accuracy ± 0.5mm
Robot Type Single Arm Yaskawa Robot
Spin Speed 30 ~ 1000rpm
Spin Speed Accuracy ± 5%
Acceleration 0 → 1000 rpm / 30 Sec.
Chemical Dispense System Alkaline Chemical
Brush Unit YES
MS Unit YES
DIW Rinse YES
N2 Dry Nozzle YES
Chemical Temp. Control System : YES
Reverse Unit 270°
Inspection Light Spot light / Green Lamp / Back Light
EUV Lamp 172nm
EUV light Intensity > 50mW / cm2
Recipe 30 Recipes x 50 Steps

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