Mask Cleaner
ELS407FA
觀看設備規格：
- ELS407FA
| Work Size： | □5" & □7" |
| Robot Type： | Single arm with mapping System |
| Spin Speed： | 50 ~ 2000rpm |
| Spin Speed Accuracy： | ± 1% |
| Acceleration： | 3000rpm / sec. |
| Chemical Nozzle： | 1 System |
| Chemical Temp. Control System： | Option |
| Brush Nozzle： | 1 System |
| MS Nozzle： | 1 System |
| DIW Rinse： | YES |
| N2 Dry Nozzle： | YES |
| Chemical Temp. Control System： | YES |
| Reverse Unit: | 270° |
| Recipe： | 30 Recipe x 50 Step |
| ELS Model No. : | ELS407FA for □5" & □7" mask |
