Spin Mask Cleaner

ELS407FA

觀看設備規格:

  • ELS407FA
Work Size: 5" & 7"
Robot Type Single arm with mapping System
Spin Speed 50 ~ 2000rpm
Spin Speed Accuracy ± 1%
Acceleration 3000rpm / sec.
Chemical Nozzle 1 System
Chemical Temp. Control System Option
Brush Nozzle 1 System
MS Nozzle 1 System
DIW Rinse YES
N2 Dry Nozzle YES
Chemical Temp. Control System YES
 Reverse Unit: 270°
Recipe 30 Recipe x 50 Step
ELS Model No. : ELS407FA for 5" & 7" mask

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