Spin Coater
ELS3608FA
觀看設備規格：
- ELS3608FA
| Wafer Size： | 150mm ~ 200mm wafer |
| Layout Unit： | LD / Robot / Centering / Coater / HP / CP / ULD |
| Robot Type： |
Double arms with mapping system (Option : Auto Load Port System) |
| Clean Class： | Class 100 with HEPA |
| Spin Speed： | 50 ~ 5000 rpm |
| Acceleration： | 8000 rpm / sec. |
| PR Dispense Method： |
N2 Pressure Tank or Pump (Option: PR Pump for High Viscosity up to 10,000 cps) |
| Edge / Back Side Rinse： | YES |
| HP Temp： | 30 ~ 200°C |
| Heating Method： | Contact / Proximity |
| System Control： | PC Base (Option : CIM / SECS+GEM available ) |
| PLC Sequencer： | Mitsubishi Q series |
| Recipe： | 30 recipes x 50 steps |
| Throughput / hr： | Up to 50pcs based on PR coating recipe |
