Spin Coater
ELS3606FA/ELS3604FA
觀看設備規格：
- ELS3606FA
- ELS3604FA
| Wafer Size： | 100mm ~ 150mm wafer |
| Layout Unit： | LD / Robot / Centering / Coater / HP / CP / ULD |
| Robot Type： |
Double arms with mapping system |
| Clean Class： | Class 100 with HEPA |
| Spin Speed： | 50 ~ 7000 rpm |
| Acceleration： | 10000 rpm / sec. |
| PR Dispense Method： |
Pump (< 100 cp) |
| Edge / Back Side Rinse： | YES |
| HP Temp： | 30 ~ 150°C |
| Heating Method： | Contact / Proximity |
| System Control： | PC Base (Option : CIM function available) |
| PLC Sequencer： | Mitsubishi Q series |
| Recipe： | 30 recipe x 50 step |
| Throughput / hr： | 100 ~ 120 pcs based on PR coating recipe |
| Model No. ： | ELS3606FA |
| Wafer Size： | 50mm ~ 100mm wafer |
| Layout Unit： | LD / Robot / Centering / Coater / HP / CP / ULD |
| Robot Type： |
Double arms with mapping system |
| Clean Class： | Class 100 with HEPA |
| Spin Speed： | 50 ~ 7000 rpm |
| Acceleration： | 10000 rpm / sec. |
| PR Dispense Method： |
Pump (< 100 cp) |
| Edge / Back Side Rinse： | YES |
| HP Temp： | 30 ~ 150°C |
| Heating Method： | Contact / Proximity |
| System Control： | PC Base (Option : CIM function available) |
| PLC Sequencer： | Mitsubishi Q series |
| Recipe： | 30 recipe x 50 step |
| Throughput / hr： | 100 ~ 120 pcs based on PR coating recipe |
| Model No. ： | ELS3604FA |
