Mask Aligner
ELS106SA-B/ELS106SA
觀看設備規格：
- ELS106SA-B
- ELS106SA
| Work Size： |
ψ50mm~150mm wafer or Max. □150mm x 150 mm substrate |
| Mask Size： | □4" ~ □7" Quartz or Soda Lime |
| Lamp House Watt： | 250W |
| Wavelength Range： |
Broad Band ( i line : 365nm / h line : 400nm / g line : 436 nm ) |
| Light Intensity： |
> 16 mW / cm2 based on 365 nm (250W) > 40 mW / cm2 based on 365 nm (500W) |
| Lamp Source： | High Mercury Lamp |
| Light Intensity Uniformity： | < 3% based on Dia. 4" wafer |
| Effective Exposure Area： | Max. □150 mm x 150 mm |
| Compensation Leveling System Driven： | By Auto |
| Contact Driven： | By Auto |
| Exposure Mode： |
Proximity / Soft Contact / Hard Contact / Vacuum Contact |
| Alignment System： | By CCD driven by manual method |
| Alignment Accuracy： |
±1μm for top side alignment ±3μm for bottom side alignment |
| L/S Resolution： | 1μm based on contact mode and PR thickness 1μm |
| Anti-vibration Table： | Yes |
| System Control： | PC Base |
| Option： |
Cut Filter 500W Lamp House DUV Lamp House 積算光量功能 Power Meter |
| ELS Model No. ： | ELS106SA-B |
| Work Size： |
ψ50mm~150mm wafer or Max. □150mm x 150 mm substrate |
| Mask Size： | □4" ~ □7" Quartz or Soda Lime |
| Lamp House Watt： | 250W |
| Wavelength Range： |
Broad Band ( i line : 365nm / h line : 400nm / g line : 436 nm ) |
| Light Intensity： |
> 16 mW / cm2 based on 365 nm (250W) > 40 mW / cm2 based on 365 nm (500W) |
| Lamp Source： | High Mercury Lamp |
| Light Intensity Uniformity： | < 3% based on Dia. 4" wafer |
| Effective Exposure Area： | Max. □150 mm x 150 mm |
| Compensation Leveling System Driven： | By Auto |
| Contact Driven： | By Auto |
| Exposure Mode： |
Proximity / Soft Contact / Hard Contact / Vacuum Contact |
| Alignment System： | By CCD driven by manual method |
| Alignment Accuracy： | ±1μm |
| L/S Resolution： | 1μm based on contact mode and PR thickness 1μm |
| Anti-vibration Table： | Yes |
| System Control： | PC Base |
| Option： |
Cut Filter 500W Lamp House DUV Lamp House Chuck for Broken wafer 積算光量功能 Power Meter |
| ELS Model No. ： | ELS106SA |
